Y-Ba-Cu-O superconducting films were prepared at 700 and 720°C on SrTiO3(1 0 0) single crystal substrates by thermal chemical vapor deposition (CVD) using β-diketone metal chelates as sources. Total gas pressure in a hot-wall type CVD reactor used was 10 Torr. Oxygen partial pressure (P(O2)) was 0.036 Torr. The films mostly consisted of YBa2Cu3Ox with c-axis orientation perpendicular to the substrate plane and included small amounts of grains with a-axis orientation. These films showed zero resistivity at 90 K. The critical current densities (Jc, criterion: 2 μV/cm) of the films obtained at 700 and 720°C were 2.2×106 and 2.9×106 A/cm2 at 77.3 K and 0 T, respectively. A Jc of 2.1 × 104 A/cm2 was measured at 77.3 K in a magnetic field of 23 T for the film prepared at 720°C.
ASJC Scopus subject areas
- Electronic, Optical and Magnetic Materials
- Condensed Matter Physics
- Energy Engineering and Power Technology
- Electrical and Electronic Engineering