Low-temperature fabrication of L10 ordered FePt alloy with perpendicular anisotropy by alternate monatomic layer deposition

T. Shima, T. Moriguchi, S. Mitani, Koki Takanashi

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

Ll0-type ordered FePt alloy with large magnetic anisotropy has attracted much attention in recent years, since it is a potential material for extensive applications such as ultrahigh density recording media and bias magnets in monolithic microwave integrated circuit. A lot of studies were performed for FePt alloy films obtained by conventional deposition techniques followed by appropriate heat treatment. It is well known, however, the growth temperature and/or the post annealing temperature are required to be high (usually more than 500°C) for the preparation of highly ordered Fe-Pt alloy films. For practical use, it is essential to reduce the growth temperature. In this paper, we propose that the alternate monatomic layer deposition should be one of powerful methods for preparing Ll0-type ordered Fe-Pt alloy films at reduced temperature.

Original languageEnglish
Title of host publicationINTERMAG Europe 2002 - IEEE International Magnetics Conference
EditorsJ. Fidler, B. Hillebrands, C. Ross, D. Weller, L. Folks, E. Hill, M. Vazquez Villalabeitia, J. A. Bain, Jo De Boeck, R. Wood
PublisherInstitute of Electrical and Electronics Engineers Inc.
ISBN (Electronic)0780373650, 9780780373655
DOIs
Publication statusPublished - 2002 Jan 1
Event2002 IEEE International Magnetics Conference, INTERMAG Europe 2002 - Amsterdam, Netherlands
Duration: 2002 Apr 282002 May 2

Publication series

NameINTERMAG Europe 2002 - IEEE International Magnetics Conference

Other

Other2002 IEEE International Magnetics Conference, INTERMAG Europe 2002
CountryNetherlands
CityAmsterdam
Period02/4/2802/5/2

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Electrical and Electronic Engineering
  • Surfaces, Coatings and Films

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