Low-temperature fabrication of L10 ordered FePt alloy by alternate monatomic layer deposition

T. Shima, T. Moriguchi, S. Mitani, K. Takanashi

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241 Citations (Scopus)


L10 ordered FePt alloy films with large magnetic anisotropy have been successfully prepared by alternating Fe(001) and Pt(001) monatomic layers on MgO (001) substrates at low temperatures below 230°C. In addition to the fundamental (002) peak, (001) and (003) superlattice peaks have clearly been observed in the x-ray diffraction patterns for all the samples, indicating the formation of L10 ordered structure. The magnetization measurements show that all the samples are perpendicularly magnetized. Large uniaxial magnetic anisotropy (Ku=3.0×107erg/cc) and high chemical ordering (long-range order parameter S=0.7±0.1) have been obtained even at the substrate temperature Ts=200°C. The magnetization curves show good magnetic squareness (Mr/Ms∼0.9) for the samples grown at Ts≥160°C.

Original languageEnglish
Pages (from-to)288-290
Number of pages3
JournalApplied Physics Letters
Issue number2
Publication statusPublished - 2002 Jan 14

ASJC Scopus subject areas

  • Physics and Astronomy (miscellaneous)

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