Low-temperature epitaxial growth of in-situ doped silicon films

Roland Kircher, Makoto Furuno, Junichi Murota, Shoichi Ono

Research output: Contribution to journalArticlepeer-review

8 Citations (Scopus)

Fingerprint Dive into the research topics of 'Low-temperature epitaxial growth of in-situ doped silicon films'. Together they form a unique fingerprint.

Chemical Compounds

Engineering & Materials Science

Physics & Astronomy