Low-temperature deposition of y-ba-cu-o superconducting films by thermal chemical vapor deposition

Hisanori Yamane, Masaharu Hasei, Hideyuki Kurosawa, Toshio Hirai

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    16 Citations (Scopus)

    Abstract

    Y-Ba-Cu-O superconducting films having a zero-resistance temperature of 84-85 K were prepared at 650°C on SrXiO3(100) single-crystal substrates without postannealing by thermal chemical vapor deposition using β-diketone metal chelates as sources and O2 with low partial pressure as a reactant gas. The films mainly consisted of YBa2Cu3OX with a- axis and c-axis orientations normal to the film planes.

    Original languageEnglish
    Pages (from-to)L1003-L1005
    JournalJapanese journal of applied physics
    Volume30
    Issue number6
    DOIs
    Publication statusPublished - 1991 Jun

    Keywords

    • Chemical vapor deposition
    • Film surface structure
    • Low-temperature growth
    • O
    • Superconducting transition temperature
    • Y-Ba-Cu-O superconducting film
    • β-diketone metal chelates

    ASJC Scopus subject areas

    • Engineering(all)
    • Physics and Astronomy(all)

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