Low-temperature deposition of y-ba-cu-o superconducting films by thermal chemical vapor deposition

Hisanori Yamane; Masaharu Hasei; Hideyuki Kurosawa; Toshio Hirai

doi:10.1143/JJAP.30.L1003

Low-temperature deposition of y-ba-cu-o superconducting films by thermal chemical vapor deposition

Hisanori Yamane, Masaharu Hasei, Hideyuki Kurosawa, Toshio Hirai

Division of Inorganic Material Research

Research output: Contribution to journal › Article › peer-review

16 Citations (Scopus)

Abstract

Y-Ba-Cu-O superconducting films having a zero-resistance temperature of 84-85 K were prepared at 650°C on SrXiO₃(100) single-crystal substrates without postannealing by thermal chemical vapor deposition using β-diketone metal chelates as sources and O₂ with low partial pressure as a reactant gas. The films mainly consisted of YBa₂Cu₃O_X with a- axis and c-axis orientations normal to the film planes.

Original language	English
Pages (from-to)	L1003-L1005
Journal	Japanese journal of applied physics
Volume	30
Issue number	6
DOIs	https://doi.org/10.1143/JJAP.30.L1003
Publication status	Published - 1991 Jun

Keywords

Chemical vapor deposition
Film surface structure
Low-temperature growth
O
Superconducting transition temperature
Y-Ba-Cu-O superconducting film
β-diketone metal chelates

ASJC Scopus subject areas

Engineering(all)
Physics and Astronomy(all)

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10.1143/JJAP.30.L1003

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title = "Low-temperature deposition of y-ba-cu-o superconducting films by thermal chemical vapor deposition",

abstract = "Y-Ba-Cu-O superconducting films having a zero-resistance temperature of 84-85 K were prepared at 650°C on SrXiO3(100) single-crystal substrates without postannealing by thermal chemical vapor deposition using β-diketone metal chelates as sources and O2 with low partial pressure as a reactant gas. The films mainly consisted of YBa2Cu3OX with a- axis and c-axis orientations normal to the film planes.",

keywords = "Chemical vapor deposition, Film surface structure, Low-temperature growth, O, Superconducting transition temperature, Y-Ba-Cu-O superconducting film, β-diketone metal chelates",

author = "Hisanori Yamane and Masaharu Hasei and Hideyuki Kurosawa and Toshio Hirai",

year = "1991",

month = jun,

doi = "10.1143/JJAP.30.L1003",

language = "English",

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T1 - Low-temperature deposition of y-ba-cu-o superconducting films by thermal chemical vapor deposition

AU - Yamane, Hisanori

AU - Hasei, Masaharu

AU - Kurosawa, Hideyuki

AU - Hirai, Toshio

PY - 1991/6

Y1 - 1991/6

N2 - Y-Ba-Cu-O superconducting films having a zero-resistance temperature of 84-85 K were prepared at 650°C on SrXiO3(100) single-crystal substrates without postannealing by thermal chemical vapor deposition using β-diketone metal chelates as sources and O2 with low partial pressure as a reactant gas. The films mainly consisted of YBa2Cu3OX with a- axis and c-axis orientations normal to the film planes.

AB - Y-Ba-Cu-O superconducting films having a zero-resistance temperature of 84-85 K were prepared at 650°C on SrXiO3(100) single-crystal substrates without postannealing by thermal chemical vapor deposition using β-diketone metal chelates as sources and O2 with low partial pressure as a reactant gas. The films mainly consisted of YBa2Cu3OX with a- axis and c-axis orientations normal to the film planes.

KW - Chemical vapor deposition

KW - Film surface structure

KW - Low-temperature growth

KW - O

KW - Superconducting transition temperature

KW - Y-Ba-Cu-O superconducting film

KW - β-diketone metal chelates

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Low-temperature deposition of y-ba-cu-o superconducting films by thermal chemical vapor deposition

Abstract

Keywords

ASJC Scopus subject areas

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