Low-temperature deposition of y-ba-cu-o superconducting films by thermal chemical vapor deposition

Hisanori Yamane, Masaharu Hasei, Hideyuki Kurosawa, Toshio Hirai

Research output: Contribution to journalArticlepeer-review

16 Citations (Scopus)

Abstract

Y-Ba-Cu-O superconducting films having a zero-resistance temperature of 84-85 K were prepared at 650°C on SrXiO3(100) single-crystal substrates without postannealing by thermal chemical vapor deposition using β-diketone metal chelates as sources and O2 with low partial pressure as a reactant gas. The films mainly consisted of YBa2Cu3OX with a- axis and c-axis orientations normal to the film planes.

Original languageEnglish
Pages (from-to)L1003-L1005
JournalJapanese journal of applied physics
Volume30
Issue number6
DOIs
Publication statusPublished - 1991 Jun

Keywords

  • Chemical vapor deposition
  • Film surface structure
  • Low-temperature growth
  • O
  • Superconducting transition temperature
  • Y-Ba-Cu-O superconducting film
  • β-diketone metal chelates

ASJC Scopus subject areas

  • Engineering(all)
  • Physics and Astronomy(all)

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