Low-temperature deposition of Y-Ba-Cu-O superconducting films by thermal chemical vapor deposition

Hisanori Yamane, Masaharu Hasei, Hideyuki Kurosawa, Toshio Hirai

Research output: Contribution to journalArticle

7 Citations (Scopus)

Abstract

Y-Ba-Cu-O superconducting films having a zero-resistance temperature of 84-85 K were prepared at 650°C on SrTiO3(100) single-crystal substrates without postannealing by thermal chemical vapor deposition using β-diketone metal chelates as sources and O2 with low partial pressure as a reactant gas. The films mainly consisted of YBa2Cu3Ox with a-axis and c-axis orientations normal to the film planes.

Original languageEnglish
Pages (from-to)1000-1002
Number of pages3
JournalJapanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers
Volume30
Issue number6 A
Publication statusPublished - 1991 Jun 1

ASJC Scopus subject areas

  • Engineering(all)
  • Physics and Astronomy(all)

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