Low-Temperature Cleaning of HF-Passivated Si(111) Surface with VUV Light

Yuji Takakuwa, Masafumi Nogawa, Michio Niwano, Hitoshi Katakura, Satoshi Matsuyoshi, Hiroyuki Ishida, Nobuo Miyamoto, Hiroo Kato

Research output: Contribution to journalArticlepeer-review

22 Citations (Scopus)

Fingerprint

Dive into the research topics of 'Low-Temperature Cleaning of HF-Passivated Si(111) Surface with VUV Light'. Together they form a unique fingerprint.

Physics & Astronomy

Engineering & Materials Science