Low-temperature chemical vapor deposition of YBa2Cu3Ox films

Hideaki Zama; Shunri Oda; Takayuki Miyake; Takeo Hattori

doi:10.1016/0921-4534(91)91176-5

Low-temperature chemical vapor deposition of YBa₂Cu₃O_x films

Hideaki Zama, Shunri Oda, Takayuki Miyake, Takeo Hattori

Research output: Contribution to journal › Article › peer-review

2 Citations (Scopus)

Abstract

Low-temperature growth of YBa₂Cu₃O_x films by CVD has been investigated using Y (DPM)₃, Ba (DPM)₂ and Cu (DPM)₂ as starting materials and N₂O as an oxidizing agent. 123-perovskite structure has been prepared at a substrate temperature of 530°C. Superconducting films with zero-resistivity T_c of 15K and T_onset=87K has been obtained at T_sub=610°C and T_c=83K, T_onset=89K at T_sub=650°C. A 254nm-light has promoted decomposition of β-diketonate complex at T_sub=215°C.

Original language	English
Pages (from-to)	2103-2104
Number of pages	2
Journal	Physica C: Superconductivity and its applications
Volume	185-189
Issue number	PART 3
DOIs	https://doi.org/10.1016/0921-4534(91)91176-5
Publication status	Published - 1991 Dec 1

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Condensed Matter Physics
Energy Engineering and Power Technology
Electrical and Electronic Engineering

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title = "Low-temperature chemical vapor deposition of YBa2Cu3Ox films",

abstract = "Low-temperature growth of YBa2Cu3Ox films by CVD has been investigated using Y (DPM)3, Ba (DPM)2 and Cu (DPM)2 as starting materials and N2O as an oxidizing agent. 123-perovskite structure has been prepared at a substrate temperature of 530°C. Superconducting films with zero-resistivity Tc of 15K and Tonset=87K has been obtained at Tsub=610°C and Tc=83K, Tonset=89K at Tsub=650°C. A 254nm-light has promoted decomposition of β-diketonate complex at Tsub=215°C.",

author = "Hideaki Zama and Shunri Oda and Takayuki Miyake and Takeo Hattori",

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T1 - Low-temperature chemical vapor deposition of YBa2Cu3Ox films

AU - Zama, Hideaki

AU - Oda, Shunri

AU - Miyake, Takayuki

AU - Hattori, Takeo

PY - 1991/12/1

Y1 - 1991/12/1

N2 - Low-temperature growth of YBa2Cu3Ox films by CVD has been investigated using Y (DPM)3, Ba (DPM)2 and Cu (DPM)2 as starting materials and N2O as an oxidizing agent. 123-perovskite structure has been prepared at a substrate temperature of 530°C. Superconducting films with zero-resistivity Tc of 15K and Tonset=87K has been obtained at Tsub=610°C and Tc=83K, Tonset=89K at Tsub=650°C. A 254nm-light has promoted decomposition of β-diketonate complex at Tsub=215°C.

AB - Low-temperature growth of YBa2Cu3Ox films by CVD has been investigated using Y (DPM)3, Ba (DPM)2 and Cu (DPM)2 as starting materials and N2O as an oxidizing agent. 123-perovskite structure has been prepared at a substrate temperature of 530°C. Superconducting films with zero-resistivity Tc of 15K and Tonset=87K has been obtained at Tsub=610°C and Tc=83K, Tonset=89K at Tsub=650°C. A 254nm-light has promoted decomposition of β-diketonate complex at Tsub=215°C.

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