TY - JOUR
T1 - Low-temperature chemical vapor deposition of YBa2Cu3Ox films
AU - Zama, Hideaki
AU - Oda, Shunri
AU - Miyake, Takayuki
AU - Hattori, Takeo
N1 - Funding Information:
ACKNOWLEDGEMENTS This work was supported in part by a Grant-in-Aid for Scientific Research on Priority Areas, Ministry of Education, Science and Cut-lure and by the TEPCO Research Foundation. We are indebted to Tosoh Akzo Co. for synthe-siz:ns the metatorgan:c materials.
PY - 1991/12/1
Y1 - 1991/12/1
N2 - Low-temperature growth of YBa2Cu3Ox films by CVD has been investigated using Y (DPM)3, Ba (DPM)2 and Cu (DPM)2 as starting materials and N2O as an oxidizing agent. 123-perovskite structure has been prepared at a substrate temperature of 530°C. Superconducting films with zero-resistivity Tc of 15K and Tonset=87K has been obtained at Tsub=610°C and Tc=83K, Tonset=89K at Tsub=650°C. A 254nm-light has promoted decomposition of β-diketonate complex at Tsub=215°C.
AB - Low-temperature growth of YBa2Cu3Ox films by CVD has been investigated using Y (DPM)3, Ba (DPM)2 and Cu (DPM)2 as starting materials and N2O as an oxidizing agent. 123-perovskite structure has been prepared at a substrate temperature of 530°C. Superconducting films with zero-resistivity Tc of 15K and Tonset=87K has been obtained at Tsub=610°C and Tc=83K, Tonset=89K at Tsub=650°C. A 254nm-light has promoted decomposition of β-diketonate complex at Tsub=215°C.
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U2 - 10.1016/0921-4534(91)91176-5
DO - 10.1016/0921-4534(91)91176-5
M3 - Article
AN - SCOPUS:0026389030
VL - 185-189
SP - 2103
EP - 2104
JO - Physica C: Superconductivity and its Applications
JF - Physica C: Superconductivity and its Applications
SN - 0921-4534
IS - PART 3
ER -