Low temperature, beam-orientation-dependent, lattice-plane-independent, and damage-free oxidation for three-dimensional structure by neutral beam oxidation

Masahiro Yonemoto, Toru Ikoma, Keisuke Sano, Kazuhiko Endo, Takashi Matsukawa, Meishoku Masahara, Seiji Samukawa

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17 Citations (Scopus)

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Physics & Astronomy

Engineering & Materials Science