Fingerprint Dive into the research topics of 'Low resistive ALD TiN metal gate using TDMAT precursor for high performance MOSFET'. Together they form a unique fingerprint.
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T. Hayashida, K. Endo, Y. X. Liu, T. Kamei, T. Matsukawa, S. Ouchi, K. Sakamoto, J. Tsukada, Y. Ishikawa, H. Yamauchi, A. Ogura, M. Masahara
Research output: Chapter in Book/Report/Conference proceeding › Conference contribution