Low-Loss Proton-Exchanged Waveguide in MgO-Doped LiNbO3 Fabricated with Pyrophosphoric Acid Using Ta2O3 Protective Mask

Shigeru Ohmori, Kazuhisa Yamamoto, Tetsuo Taniuchi

Research output: Contribution to journalArticlepeer-review


We describe low-loss proton-exchanged channel waveguides in MgO-doped LiNbO3. A Ta2O3 sputtered film is applied as a protective mask against proton exchanging with pyrophosphoric acid. The propagation loss of the waveguide, measured with laser diode light (λ = 0.83 μm), is 0.5 dB/cm. It is shown that the use of Ta2O5 mask reduces the propagation loss compared with the use of Ta mask (1.5 dB/cm).

Original languageEnglish
Pages (from-to)1099-1101
Number of pages3
JournalIEEE Photonics Technology Letters
Issue number12
Publication statusPublished - 1991 Dec

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Atomic and Molecular Physics, and Optics
  • Electrical and Electronic Engineering

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