Low-Loss Proton-Exchanged Waveguide in MgO-Doped LiNbO3 Fabricated with Pyrophosphoric Acid Using Ta2O3 Protective Mask

Shigeru Ohmori; Kazuhisa Yamamoto; Tetsuo Taniuchi

doi:10.1109/68.118014

Low-Loss Proton-Exchanged Waveguide in MgO-Doped LiNbO₃ Fabricated with Pyrophosphoric Acid Using Ta₂O₃ Protective Mask

Shigeru Ohmori, Kazuhisa Yamamoto, Tetsuo Taniuchi

Advanced Interdisciplinary Research Division

Research output: Contribution to journal › Article › peer-review

Abstract

We describe low-loss proton-exchanged channel waveguides in MgO-doped LiNbO₃. A Ta₂O₃ sputtered film is applied as a protective mask against proton exchanging with pyrophosphoric acid. The propagation loss of the waveguide, measured with laser diode light (λ = 0.83 μm), is 0.5 dB/cm. It is shown that the use of Ta₂O₅ mask reduces the propagation loss compared with the use of Ta mask (1.5 dB/cm).

Original language	English
Pages (from-to)	1099-1101
Number of pages	3
Journal	IEEE Photonics Technology Letters
Volume	3
Issue number	12
DOIs	https://doi.org/10.1109/68.118014
Publication status	Published - 1991 Dec

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Atomic and Molecular Physics, and Optics
Electrical and Electronic Engineering

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abstract = "We describe low-loss proton-exchanged channel waveguides in MgO-doped LiNbO3. A Ta2O3 sputtered film is applied as a protective mask against proton exchanging with pyrophosphoric acid. The propagation loss of the waveguide, measured with laser diode light (λ = 0.83 μm), is 0.5 dB/cm. It is shown that the use of Ta2O5 mask reduces the propagation loss compared with the use of Ta mask (1.5 dB/cm).",

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year = "1991",

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AB - We describe low-loss proton-exchanged channel waveguides in MgO-doped LiNbO3. A Ta2O3 sputtered film is applied as a protective mask against proton exchanging with pyrophosphoric acid. The propagation loss of the waveguide, measured with laser diode light (λ = 0.83 μm), is 0.5 dB/cm. It is shown that the use of Ta2O5 mask reduces the propagation loss compared with the use of Ta mask (1.5 dB/cm).

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