We describe low-loss proton-exchanged channel waveguides in MgO-doped LiNbO3. A Ta2O3 sputtered film is applied as a protective mask against proton exchanging with pyrophosphoric acid. The propagation loss of the waveguide, measured with laser diode light (λ = 0.83 μm), is 0.5 dB/cm. It is shown that the use of Ta2O5 mask reduces the propagation loss compared with the use of Ta mask (1.5 dB/cm).
ASJC Scopus subject areas
- Electronic, Optical and Magnetic Materials
- Atomic and Molecular Physics, and Optics
- Electrical and Electronic Engineering