Low loss intermediate-frequency resonator filter using shear horizontal type leaky surface acoustic wave on α-phase heavy metal film/quartz

Michio Kadota, Eiichi Takata, Masatoshi Nakagawa, Makoto Tose, Yasuji Yamamoto

Research output: Contribution to journalArticlepeer-review

3 Citations (Scopus)

Abstract

By applying a new shear horizontal (SH)-type leaky surface acoustic wave (LSAW) excited by interdigital transducers (IDTs) and reflectors made of Ta or W on an ST-cut 90°X-propagation (direction perpendicular to X-axis) quartz substrate, we succeeded in fabricating very small resonator filters (1/5-1/4 of conventional device sizes). However, the Ta and W films used in our filters were β-Ta and β-W, which have resistances higher than that of an Al film. α-Ta and α-W films with very low resistivities have been successfully deposited in place of β-Ta and β-W films. The insertion loss of resonator filters consisting Ta- or W-electrode/ST-90°X quartz has been improved by 1.5-8 dB using the α-Ta or the α-W film electrode.

Original languageEnglish
Pages (from-to)3047-3049
Number of pages3
JournalJapanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers
Volume43
Issue number5 B
DOIs
Publication statusPublished - 2004 May

Keywords

  • Low loss
  • Resistivity
  • Resonator filter
  • SH-LSAW
  • α-phase metal film

ASJC Scopus subject areas

  • Engineering(all)
  • Physics and Astronomy(all)

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