Low loss intermediate-frequency resonator filter using shear horizontal type leaky surface acoustic wave on α-phase heavy metal film/quartz

Michio Kadota; Eiichi Takata; Masatoshi Nakagawa; Makoto Tose; Yasuji Yamamoto

doi:10.1143/JJAP.43.3047

Low loss intermediate-frequency resonator filter using shear horizontal type leaky surface acoustic wave on α-phase heavy metal film/quartz

Michio Kadota, Eiichi Takata, Masatoshi Nakagawa, Makoto Tose, Yasuji Yamamoto

ENG - Robotics

Research output: Contribution to journal › Article › peer-review

3 Citations (Scopus)

Abstract

By applying a new shear horizontal (SH)-type leaky surface acoustic wave (LSAW) excited by interdigital transducers (IDTs) and reflectors made of Ta or W on an ST-cut 90°X-propagation (direction perpendicular to X-axis) quartz substrate, we succeeded in fabricating very small resonator filters (1/5-1/4 of conventional device sizes). However, the Ta and W films used in our filters were β-Ta and β-W, which have resistances higher than that of an Al film. α-Ta and α-W films with very low resistivities have been successfully deposited in place of β-Ta and β-W films. The insertion loss of resonator filters consisting Ta- or W-electrode/ST-90°X quartz has been improved by 1.5-8 dB using the α-Ta or the α-W film electrode.

Original language	English
Pages (from-to)	3047-3049
Number of pages	3
Journal	Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers
Volume	43
Issue number	5 B
DOIs	https://doi.org/10.1143/JJAP.43.3047
Publication status	Published - 2004 May

Keywords

Low loss
Resistivity
Resonator filter
SH-LSAW
α-phase metal film

ASJC Scopus subject areas

Engineering(all)
Physics and Astronomy(all)

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Low loss intermediate-frequency resonator filter using shear horizontal type leaky surface acoustic wave on α-phase heavy metal film/quartz. / Kadota, Michio; Takata, Eiichi; Nakagawa, Masatoshi; Tose, Makoto; Yamamoto, Yasuji.

In: Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers, Vol. 43, No. 5 B, 05.2004, p. 3047-3049.

Research output: Contribution to journal › Article › peer-review

Kadota, M, Takata, E, Nakagawa, M, Tose, M & Yamamoto, Y 2004, 'Low loss intermediate-frequency resonator filter using shear horizontal type leaky surface acoustic wave on α-phase heavy metal film/quartz', Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers, vol. 43, no. 5 B, pp. 3047-3049. https://doi.org/10.1143/JJAP.43.3047

Kadota, Michio ; Takata, Eiichi ; Nakagawa, Masatoshi ; Tose, Makoto ; Yamamoto, Yasuji. / Low loss intermediate-frequency resonator filter using shear horizontal type leaky surface acoustic wave on α-phase heavy metal film/quartz. In: Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers. 2004 ; Vol. 43, No. 5 B. pp. 3047-3049.

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