Low-leakage MIS structures with 1.5-6 nm CaF2 insulating layer on Si(1 1 1)

N. S. Sokolov, I. V. Grekhov, S. Ikeda, A. K. Kaveev, A. V. Krupin, K. Saiki, K. Tsutsui, S. E. Tyaginov, M. I. Vexler

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