Low-k PZT film for commercial use

Mario Kiuchi, Ryoma Miyake, Shinya Yoshida, Shuji Tanaka, Tsuyoshi Takemoto, Yukitaka Yamaguchi, Kenji Komaki

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

Monocrystalline-like epitaxial PZT films for commercial use are described for piezoelectric MEMS applications. Films at the morphotropic phase boundary (MPB) with a thickness of 1 µm to 2 µm exhibit a typical transverse piezoelectric d31 coefficient of -185 pm/V, relative dielectric permittivity of 430 and dielectric loss of 0.015. The figure-of-merit for MEMS device is more than 50 GPa. These films are commercially available for piezoelectric MEMS device development and production.

Original languageEnglish
Title of host publicationIUS 2020 - International Ultrasonics Symposium, Proceedings
PublisherIEEE Computer Society
ISBN (Electronic)9781728154480
DOIs
Publication statusPublished - 2020 Sep 7
Event2020 IEEE International Ultrasonics Symposium, IUS 2020 - Las Vegas, United States
Duration: 2020 Sep 72020 Sep 11

Publication series

NameIEEE International Ultrasonics Symposium, IUS
Volume2020-September
ISSN (Print)1948-5719
ISSN (Electronic)1948-5727

Conference

Conference2020 IEEE International Ultrasonics Symposium, IUS 2020
CountryUnited States
CityLas Vegas
Period20/9/720/9/11

Keywords

  • Epitaxial
  • Piezoelectric
  • PZT
  • Sputtering
  • Thin film

ASJC Scopus subject areas

  • Acoustics and Ultrasonics

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