Low frictional coating by cosputtering in combination with excimer laser irradiation for aerospace applications

Masahiro Goto, Akira Kasahara, Masahiro Tosa, Jonathan Hobley, Maki Kishimoto, Kazuhiro Yoshihara, Hiroshi Fukumura

Research output: Contribution to journalArticlepeer-review

15 Citations (Scopus)

Abstract

Surface oxidized BN/Cu coating films on stainless steel substrates were synthesized by magnetron cosputtering combined with KrF excimer laser irradiation. The irradiated films had very low frictional coefficients in UHV conditions. The low frictional property was maintained even after oxidation and prolonged UV irradiation. Thus, it was confirmed that the coating is suitable for several aerospace applications.

Original languageEnglish
Pages (from-to)1458-1461
Number of pages4
JournalJournal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Volume20
Issue number4
DOIs
Publication statusPublished - 2002 Jul

ASJC Scopus subject areas

  • Condensed Matter Physics
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films

Fingerprint Dive into the research topics of 'Low frictional coating by cosputtering in combination with excimer laser irradiation for aerospace applications'. Together they form a unique fingerprint.

Cite this