Low-dielectric-constant nonporous fluorocarbon films for interlayer dielectric

Azumi Itoh, Atsutoshi Inokuchi, Seiji Yasuda, Akinobu Teramoto, Tetsuya Goto, Masaki Hirayama, Tadahiro Ohmi

Research output: Contribution to journalArticlepeer-review

19 Citations (Scopus)

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Engineering & Materials Science

Physics & Astronomy