Low-damage plasma processing of polymers for development of organic-inorganic flexible devices

Yuichi Setsuhara, Ken Cho, Kosuke Takenaka, Masaharu Shiratani, Makoto Sekine, Masaru Hori

Research output: Contribution to journalArticlepeer-review

7 Citations (Scopus)

Abstract

Plasma generation and control technologies for processing of polymers have been developed with multiple low-inductance antenna (LIA) units, as a promising candidate for next-generation processing of hybrid flexible devices. Properties of argon-oxygen mixture plasmas sustained with multiple LIA units have been investigated in terms of ion energies bombarding onto polymer surface. Ion energy distribution at the sheath edge of the argon-oxygen mixture plasmas showed considerable suppression of ion energies as small as or less than 10 eV. Effects of the plasma exposure onto polymers have been examined using hard x-ray photoelectron spectroscopy (HXPES) in terms of chemical bonding states of the polymer surface and the interface between polymer and silicon film.

Original languageEnglish
Pages (from-to)S355-S359
JournalSurface and Coatings Technology
Volume205
Issue numberSUPPL. 1
DOIs
Publication statusPublished - 2010 Dec 25

Keywords

  • Hard x-ray photoelectron spectroscopy
  • Inductively-coupled plasma
  • Low inductance antenna
  • Low-damage process
  • Organic-inorganic device

ASJC Scopus subject areas

  • Chemistry(all)
  • Condensed Matter Physics
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films
  • Materials Chemistry

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