Low-damage fabrication of high aspect nanocolumns by using neutral beams and ferritin-iron-core mask

Tomohiro Kubota, Tomohiro Baba, Suguru Saito, Satoshi Yamasaki, Shinya Kumagai, Takuo Matsui, Yukiharu Uraoka, Takashi Fuyuki, Ichiro Yamashita, Seiji Samukawa

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9 Citations (Scopus)

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Physics & Astronomy

Engineering & Materials Science