Damage-free surface nitridation of terphenyl methanethiol self-assembled monolayers (TP1-SAMs) was investigated using a novel low-energy N2 neutral beam (NB) irradiation technique. When a conventional inductively coupled plasma process was used, x-ray photoelectron spectra confirmed that the TP1-SAM was quickly broken because ions or ultraviolet (UV) photons enhance the surface decomposition and molecular desorption. Conversely, with the N 2 NB radiation process, which is free of ions and UV photons, there was little difference in the atomic ratios of x-ray photoelectron spectra before and after NB irradiation. These results suggest that low-damage surface modification is possible through the authors' NB technique.
ASJC Scopus subject areas
- Physics and Astronomy (miscellaneous)