TY - GEN
T1 - Low contact resistance micro thermal switch with carbon-nanotube-enhanced contactor
AU - Tsukamoto, T.
AU - Esashi, Masayoshi
AU - Tanaka, S.
PY - 2009/12/11
Y1 - 2009/12/11
N2 - We demonstrated considerable reduction of thermal contact resistance (TCR) in microscale using carbon nanotubes (CNTs), and applied this technology to a micro thermal switch for magnetic refrigeration. A micro thermal contactor with a PECVD-grown 10 μm long "CNT carpet" shows a TCR of ca. 600 mm2K/W at a contact pressure of 20 kPa. The reliability of this data was confirmed by the extrapolation of published data in macroscale based on an empirical equation. The Off/On thermal resistance ratio of the thermal switch was ca. 7.3.
AB - We demonstrated considerable reduction of thermal contact resistance (TCR) in microscale using carbon nanotubes (CNTs), and applied this technology to a micro thermal switch for magnetic refrigeration. A micro thermal contactor with a PECVD-grown 10 μm long "CNT carpet" shows a TCR of ca. 600 mm2K/W at a contact pressure of 20 kPa. The reliability of this data was confirmed by the extrapolation of published data in macroscale based on an empirical equation. The Off/On thermal resistance ratio of the thermal switch was ca. 7.3.
KW - Carbon nanotube (CNT)
KW - Thermal contact resistance
KW - Thermal switch
UR - http://www.scopus.com/inward/record.url?scp=71449107484&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=71449107484&partnerID=8YFLogxK
U2 - 10.1109/SENSOR.2009.5285797
DO - 10.1109/SENSOR.2009.5285797
M3 - Conference contribution
AN - SCOPUS:71449107484
SN - 9781424441938
T3 - TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems
SP - 1489
EP - 1492
BT - TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems
T2 - TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems
Y2 - 21 June 2009 through 25 June 2009
ER -