Low contact resistance micro thermal switch with carbon-nanotube-enhanced contactor

Takashiro Tsukamoto; Masayoshi Esashi; Shuji Tanaka

doi:10.1109/SENSOR.2009.5285797

Low contact resistance micro thermal switch with carbon-nanotube-enhanced contactor

Takashiro Tsukamoto, Masayoshi Esashi, Shuji Tanaka

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

2 Citations (Scopus)

Abstract

We demonstrated considerable reduction of thermal contact resistance (TCR) in microscale using carbon nanotubes (CNTs), and applied this technology to a micro thermal switch for magnetic refrigeration. A micro thermal contactor with a PECVD-grown 10 μm long "CNT carpet" shows a TCR of ca. 600 mm²K/W at a contact pressure of 20 kPa. The reliability of this data was confirmed by the extrapolation of published data in macroscale based on an empirical equation. The Off/On thermal resistance ratio of the thermal switch was ca. 7.3.

Original language	English
Title of host publication	TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems
Pages	1489-1492
Number of pages	4
DOIs	https://doi.org/10.1109/SENSOR.2009.5285797
Publication status	Published - 2009 Dec 11
Event	TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems - Denver, CO, United States Duration: 2009 Jun 21 → 2009 Jun 25

Publication series

Name	TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems

Other

Other	TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems
Country	United States
City	Denver, CO
Period	09/6/21 → 09/6/25

Keywords

Carbon nanotube (CNT)
Thermal contact resistance
Thermal switch

ASJC Scopus subject areas

Hardware and Architecture
Electrical and Electronic Engineering

Access to Document

10.1109/SENSOR.2009.5285797

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Cite this

Tsukamoto, T., Esashi, M., & Tanaka, S. (2009). Low contact resistance micro thermal switch with carbon-nanotube-enhanced contactor. In TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems (pp. 1489-1492). [5285797] (TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems). https://doi.org/10.1109/SENSOR.2009.5285797

Low contact resistance micro thermal switch with carbon-nanotube-enhanced contactor. / Tsukamoto, Takashiro; Esashi, Masayoshi; Tanaka, Shuji.

TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems. 2009. p. 1489-1492 5285797 (TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Tsukamoto, T, Esashi, M & Tanaka, S 2009, Low contact resistance micro thermal switch with carbon-nanotube-enhanced contactor. in TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems., 5285797, TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems, pp. 1489-1492, TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems, Denver, CO, United States, 09/6/21. https://doi.org/10.1109/SENSOR.2009.5285797

Tsukamoto T, Esashi M, Tanaka S. Low contact resistance micro thermal switch with carbon-nanotube-enhanced contactor. In TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems. 2009. p. 1489-1492. 5285797. (TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems). https://doi.org/10.1109/SENSOR.2009.5285797

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