Low contact resistance micro thermal switch with carbon-nanotube-enhanced contactor

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2 Citations (Scopus)

Abstract

We demonstrated considerable reduction of thermal contact resistance (TCR) in microscale using carbon nanotubes (CNTs), and applied this technology to a micro thermal switch for magnetic refrigeration. A micro thermal contactor with a PECVD-grown 10 μm long "CNT carpet" shows a TCR of ca. 600 mm2K/W at a contact pressure of 20 kPa. The reliability of this data was confirmed by the extrapolation of published data in macroscale based on an empirical equation. The Off/On thermal resistance ratio of the thermal switch was ca. 7.3.

Original languageEnglish
Title of host publicationTRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems
Pages1489-1492
Number of pages4
DOIs
Publication statusPublished - 2009 Dec 11
EventTRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems - Denver, CO, United States
Duration: 2009 Jun 212009 Jun 25

Publication series

NameTRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems

Other

OtherTRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems
CountryUnited States
CityDenver, CO
Period09/6/2109/6/25

Keywords

  • Carbon nanotube (CNT)
  • Thermal contact resistance
  • Thermal switch

ASJC Scopus subject areas

  • Hardware and Architecture
  • Electrical and Electronic Engineering

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    Tsukamoto, T., Esashi, M., & Tanaka, S. (2009). Low contact resistance micro thermal switch with carbon-nanotube-enhanced contactor. In TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems (pp. 1489-1492). [5285797] (TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems). https://doi.org/10.1109/SENSOR.2009.5285797