Lost silicon mold process for PZT microstructures

Shinan Wang, Jing Feng Li, Katsuhiro Wakabayashi, Masayoshi Esashi, Ryuzo Watanabe

Research output: Contribution to journalArticlepeer-review

38 Citations (Scopus)
Original languageEnglish
Pages (from-to)873-876
Number of pages4
JournalAdvanced Materials
Issue number10
Publication statusPublished - 1999 Jul 9
Externally publishedYes

ASJC Scopus subject areas

  • Materials Science(all)
  • Mechanics of Materials
  • Mechanical Engineering

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