Locally induced stress in stacked ultrathin Si wafers: XPS and μ-Raman study

M. Murugesan, H. Nohira, H. Kobayashi, T. Fukushima, T. Tanaka, M. Koyanagi

Research output: Chapter in Book/Report/Conference proceedingConference contribution

4 Citations (Scopus)

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Chemical Compounds

Engineering & Materials Science