Local synthesis and alignment of zinc oxide nanowires in aqueous solution using microheaters

W. C. Lin, Y. C. Lin, C. J. Shih, M. Esashi, A. A. Seshia

    Research output: Chapter in Book/Report/Conference proceedingConference contribution

    3 Citations (Scopus)

    Abstract

    A bottom-up technique for synthesizing transversely suspended zinc oxide nanowires (ZnO NWs) under a zinc nitrate (Zn(NO 3) 2· 6H 2O) and hexamethylenetetramine (HMTA, (CH 2) 6·N 4) solution within a microfabricated device is reported in this paper. The device consists of a microheater which is used to initially create an oxidized ZnO seed layer. ZnO NWs are then locally synthesized by the microheater and electrodes embedded within the devices are used to drive electric field directed horizontal alignment of the nanowires within the device. The entire process is carried out at low temperature. This approach has the potential to considerably simplify the fabrication and assembly of ZnO nanowires on CMOS compatible substrates, allowing for the chemical synthesis to be carried out under near-ambient conditions by locally defining the conditions for nanowire growth on a silicon reactor chip.

    Original languageEnglish
    Title of host publication2012 IEEE 25th International Conference on Micro Electro Mechanical Systems, MEMS 2012
    Pages452-455
    Number of pages4
    DOIs
    Publication statusPublished - 2012
    Event2012 IEEE 25th International Conference on Micro Electro Mechanical Systems, MEMS 2012 - Paris, France
    Duration: 2012 Jan 292012 Feb 2

    Publication series

    NameProceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
    ISSN (Print)1084-6999

    Other

    Other2012 IEEE 25th International Conference on Micro Electro Mechanical Systems, MEMS 2012
    Country/TerritoryFrance
    CityParis
    Period12/1/2912/2/2

    ASJC Scopus subject areas

    • Electronic, Optical and Magnetic Materials
    • Condensed Matter Physics
    • Mechanical Engineering
    • Electrical and Electronic Engineering

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