Local lattice parameter determination of strained areas of semiconductors using CBED

Takayuki Akaogi, Kenji Tsuda, Masami Terauchi, Michiyoshi Tanaka

Research output: Contribution to journalArticlepeer-review

Original languageEnglish
Pages (from-to)310-311
Number of pages2
JournalMicroscopy and Microanalysis
Volume10
Issue numberSUPPL. 2
DOIs
Publication statusPublished - 2004

ASJC Scopus subject areas

  • Instrumentation

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