Local Evaluation of Al2O3 Passivation Layers for Monocrystalline Silicon Solar Cells by Super-Higher-Order Scanning Nonlinear Dielectric Microscopy

Kento Kakikawa, Yuji Yamagishi, Katsuto Tanahashi, Hidetaka Takato, Yasuo Cho

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

Local evaluation of Al2O3 passivation layers for monocrystalline silicon solar cells was performed using super-higher-order scanning nonlinear dielectric microscopy (SHO-SNDM). Non-uniform contrasts were observed in dC/dV images of Al2O3/Si samples obtained by SHO-SNDM, which suggests inhomogeneous distributions of fixed charges at Al2O3/Si interfaces. The sizes of the patterns in the dC/dV images of samples were slightly reduced by a post deposition annealing, suggesting that the distribution of the fixed charges was varied by annealing. The increase of the areal density of negative fixed charges by the post deposition annealing was estimated to be 1.91012 cm-2 by analyzing the local C-V curves obtained by SHO-SNDM.

Original languageEnglish
Title of host publication2018 IEEE 7th World Conference on Photovoltaic Energy Conversion, WCPEC 2018 - A Joint Conference of 45th IEEE PVSC, 28th PVSEC and 34th EU PVSEC
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages3118-3120
Number of pages3
ISBN (Electronic)9781538685297
DOIs
Publication statusPublished - 2018 Nov 26
Event7th IEEE World Conference on Photovoltaic Energy Conversion, WCPEC 2018 - Waikoloa Village, United States
Duration: 2018 Jun 102018 Jun 15

Publication series

Name2018 IEEE 7th World Conference on Photovoltaic Energy Conversion, WCPEC 2018 - A Joint Conference of 45th IEEE PVSC, 28th PVSEC and 34th EU PVSEC

Other

Other7th IEEE World Conference on Photovoltaic Energy Conversion, WCPEC 2018
CountryUnited States
CityWaikoloa Village
Period18/6/1018/6/15

Keywords

  • Photovoltaic cells
  • scanning probe microscopy
  • silicon-on-insulator

ASJC Scopus subject areas

  • Energy Engineering and Power Technology
  • Renewable Energy, Sustainability and the Environment
  • Electrical and Electronic Engineering
  • Electronic, Optical and Magnetic Materials

Fingerprint Dive into the research topics of 'Local Evaluation of Al2O3 Passivation Layers for Monocrystalline Silicon Solar Cells by Super-Higher-Order Scanning Nonlinear Dielectric Microscopy'. Together they form a unique fingerprint.

Cite this