A spiral coil type thin film micro-transformer with the size of 2.4 x 3.1 mm2was fabricated using photolithography techniques for application in mega-hertz region switching regulators. An amorphous magnetic film of a multilayered CoNbZr/Si02 was used as magnetic core. Load characteristics were measured at 10 MHz. A comparatively high efficiency of 67% and an acceptable excitation current of 25 mA were obtained in spite of the small size of the microtransformer.
ASJC Scopus subject areas
- Electronic, Optical and Magnetic Materials
- Electrical and Electronic Engineering