Liquid and solid states on-chip micro-supercapacitors using silicon nanowire-graphene nanowall-pani electrode based on microfabrication technology

Nguyen Van Toan, Truong Thi Kim Tuoi, Jinhua Li, Naoki Inomata, Takahito Ono

Research output: Contribution to journalArticlepeer-review

3 Citations (Scopus)

Abstract

Liquid and solid states on-chip micro-supercapacitors based on polyaniline (PANI) coated on graphene nanowalls which grown on silicon nanowires were reported in this work. Novel micro-fabrication technologies were investigated to create three dimension (3D) hierarchical electrodes. High aspect ratio silicon nanowires were produced by metal-assisted chemical etching (MACE). 3D hierarchical graphene nanowalls were grown on silicon nanowire surface by a microwave plasma-enhanced chemical vapor deposition (PECVD). Graphene nanowalls were subsequently coated by conductive PANI. Both of liquid and solid state micro-supercapacitors were successfully fabricated with symmetric face to face high density nanowire arrays separated by liquid and gel electrolytes, respectively. The areal energy and power density of the liquid-state on-chip micro-supercapacitor are 11.7 μWh/cm2 and 0.42 mW/cm2, respectively, while those of the solid-state on-chip micro-supercapacitor are 10.8 μWh/cm2 and 0.78 mW/cm2.

Original languageEnglish
Article number110977
JournalMaterials Research Bulletin
Volume131
DOIs
Publication statusPublished - 2020 Nov

Keywords

  • Graphene nanowalls
  • Metal-assisted chemical etching
  • Micro-supercapacitor
  • Nanowires
  • PANI

ASJC Scopus subject areas

  • Materials Science(all)
  • Condensed Matter Physics
  • Mechanics of Materials
  • Mechanical Engineering

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