LiNbO 3 thin film for A 1 mode of Lamb wave resonators

Michio Kadota, Takashi Ogami, Kansho Yamamoto, Hikari Tochishita

Research output: Contribution to journalArticlepeer-review

12 Citations (Scopus)

Abstract

Currently, a high frequency device more than 3 GHz is required. High frequency resonators with resonant frequencies of 4.5 and 6.3 GHz were fabricated by utilizing an anti-symmetric first mode (A 1) of a Lamb wave having a high velocity consisting of a thin LiNbO 3 film deposited by a chemical vapor deposition (CVD) system. By measuring polarities of their LiNbO 3 films, it was clarified that the thinner film had a large mixture of +c and -c domains, and the occupation ratio of main polarity influenced their frequency characteristics.

Original languageEnglish
Pages (from-to)1068-1071
Number of pages4
JournalPhysica Status Solidi (A) Applications and Materials Science
Volume208
Issue number5
DOIs
Publication statusPublished - 2011 May

Keywords

  • Lamb wave
  • LiNbO film
  • polarity
  • resonator

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films
  • Electrical and Electronic Engineering
  • Materials Chemistry

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