Layer-by-layer oxidation of silicon

T. Hattori, K. Takahashi, H. Nohira, T. Ohmi

    Research output: Contribution to journalConference articlepeer-review

    Fingerprint

    Dive into the research topics of 'Layer-by-layer oxidation of silicon'. Together they form a unique fingerprint.

    Engineering & Materials Science

    Chemical Compounds

    Physics & Astronomy