Layer-by-layer growth of high-optical-quality ZnO film on atomically smooth and lattice relaxed ZnO buffer layer

A. Tsukazaki, A. Ohtomo, S. Yoshida, M. Kawasaki, C. H. Chia, T. Makino, Y. Segawa, T. Koida, S. F. Chichibu, H. Koinuma

Research output: Contribution to journalArticlepeer-review

64 Citations (Scopus)

Abstract

The layer-by-layer growth of high-optical-quality ZnO thin films on atomically smooth and lattice relaxed ZnO buffer layer was discussed. The intensity oscillation of reflection high-energy electron diffraction persisted for more than a 100-nm film deposition under optimized conditions on buffer layer. It was found that the thin films showed free exciton emissions in a 5 K photoluminescence.

Original languageEnglish
Pages (from-to)2784-2786
Number of pages3
JournalApplied Physics Letters
Volume83
Issue number14
DOIs
Publication statusPublished - 2003 Oct 6

ASJC Scopus subject areas

  • Physics and Astronomy (miscellaneous)

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