Latest Micromachine Technology

Masayoshi Esashi

Research output: Contribution to journalArticle

Original languageEnglish
Pages (from-to)91-97
Number of pages7
JournalShinku/Journal of the Vacuum Society of Japan
Volume43
Issue number2
DOIs
Publication statusPublished - 2000 Jan

ASJC Scopus subject areas

  • Condensed Matter Physics
  • Surfaces, Coatings and Films
  • Electrical and Electronic Engineering

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