Laterally-driven piezoelectric bimorph MEMS actuator with sol-gel-based high-aspect-ratio PZT sturucture

N. Wang, S. Yoshida, M. Kumano, Yusuke Kawai, S. Tanaka, Masayoshi Esashi

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2 Citations (Scopus)

Abstract

This paper reports on the fabrication and characterization of a novel laterally-driven piezoelectric bimorph MEMS actuator with high aspect-ratio (AR) lead-zirconate-titanate (PZT) structure. In the fabrication process, the PZT structures (AR=8) was successfully fabricated by filling deep Si trenches with nanocomposite sol-gel PZT. A lateral displacement of 10 μm was obtained from a 500-μm-long actuator by bimorph actuation at driving voltages of +25 V/-5 V, while no vertical cross-motion as well as no initial vertical bending was observed. Compared with conventional capacitive comb-drive actuators, this actuator occupies a much smaller area to generate identical force or displacement. This actuator has the potential to become a new actuation technology in MEMS.

Original languageEnglish
Title of host publicationIEEE 26th International Conference on Micro Electro Mechanical Systems, MEMS 2013
Pages197-200
Number of pages4
DOIs
Publication statusPublished - 2013 Apr 2
EventIEEE 26th International Conference on Micro Electro Mechanical Systems, MEMS 2013 - Taipei, Taiwan, Province of China
Duration: 2013 Jan 202013 Jan 24

Publication series

NameProceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
ISSN (Print)1084-6999

Other

OtherIEEE 26th International Conference on Micro Electro Mechanical Systems, MEMS 2013
CountryTaiwan, Province of China
CityTaipei
Period13/1/2013/1/24

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Mechanical Engineering
  • Electrical and Electronic Engineering

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