Lateral solid-phase epitaxial growth of phosphorus-ion implanted cvd polysilicon

Terunori Warabisako, Masanobu Miyao, Masahiro Moniwa

    Research output: Contribution to journalArticle

    3 Citations (Scopus)
    Original languageEnglish
    Pages (from-to)1029-1030
    Number of pages2
    JournalJournal of the Electrochemical Society
    Volume134
    Issue number4
    DOIs
    Publication statusPublished - 1987 Apr

    ASJC Scopus subject areas

    • Electronic, Optical and Magnetic Materials
    • Renewable Energy, Sustainability and the Environment
    • Surfaces, Coatings and Films
    • Electrochemistry
    • Materials Chemistry

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