Lateral nano-channel fabricated in fused silica by femtosecond laser irradiation and wet etching

O. Nukaga, S. Yamamoto, K. V. Tabata, T. Kubota, S. Samukawa, M. Sugiyama

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Abstract

We demonstrate a lateral patch-cramp device structure, made of fused silica, whose patch pipettes were fabricated by using femtosecond laser irradiation and wet etching. The pipettes were an oval-shaped cross-section that was 200 nm × 4 μm, and the minor axis can be controlled on the nano-scale. It is expected that a Giga-seal resistance and its observation using a high magnification microscope can be simultaneously achieved. We confirmed that fluids such as buffer solutions can flow through the nano-pipettes, and some bacteria (B. Subtilis) were successfully trapped at the inlet of a nano-pipette at a given moment.

Original languageEnglish
Title of host publication14th International Conference on Miniaturized Systems for Chemistry and Life Sciences 2010, MicroTAS 2010
Pages1199-1201
Number of pages3
Publication statusPublished - 2010
Event14th International Conference on Miniaturized Systems for Chemistry and Life Sciences 2010, MicroTAS 2010 - Groningen, Netherlands
Duration: 2010 Oct 32010 Oct 7

Publication series

Name14th International Conference on Miniaturized Systems for Chemistry and Life Sciences 2010, MicroTAS 2010
Volume2

Other

Other14th International Conference on Miniaturized Systems for Chemistry and Life Sciences 2010, MicroTAS 2010
CountryNetherlands
CityGroningen
Period10/10/310/10/7

Keywords

  • Femtosecond Laser Machining
  • Fused Silica
  • Nano-Channel
  • Patch-cramp

ASJC Scopus subject areas

  • Control and Systems Engineering

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