Laser Microfabrication of Metal Surfaces by Tightly Focused Higher-Order Vector Beams

Masaki Sato, Yuichi Kozawa, Shunichi Sato

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Abstract

We present an experimental study on laser microfabrication of metal surfaces by using femtosecond, higher-order vector beams. The contribution of the longitudinal electric field in laser ablation depends on target material.

Original languageEnglish
Title of host publication2020 Conference on Lasers and Electro-Optics, CLEO 2020 - Proceedings
PublisherInstitute of Electrical and Electronics Engineers Inc.
ISBN (Electronic)9781943580767
Publication statusPublished - 2020 May
Event2020 Conference on Lasers and Electro-Optics, CLEO 2020 - San Jose, United States
Duration: 2020 May 10 → 2020 May 15

Publication series

NameConference Proceedings - Lasers and Electro-Optics Society Annual Meeting-LEOS
Volume2020-May
ISSN (Print)1092-8081

Conference

Conference2020 Conference on Lasers and Electro-Optics, CLEO 2020
CountryUnited States
CitySan Jose
Period20/5/10 → 20/5/15

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Electrical and Electronic Engineering

Fingerprint Dive into the research topics of 'Laser Microfabrication of Metal Surfaces by Tightly Focused Higher-Order Vector Beams'. Together they form a unique fingerprint.

Cite this