Laser Microfabrication of Metal Surfaces by Tightly Focused Higher-Order Vector Beams

Masaki Sato; Yuichi Kozawa; Shunichi Sato

Laser Microfabrication of Metal Surfaces by Tightly Focused Higher-Order Vector Beams

Masaki Sato, Yuichi Kozawa, Shunichi Sato

Division of Process and System Engineering

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Abstract

We present an experimental study on laser microfabrication of metal surfaces by using femtosecond, higher-order vector beams. The contribution of the longitudinal electric field in laser ablation depends on target material.

Original language	English
Title of host publication	2020 Conference on Lasers and Electro-Optics, CLEO 2020 - Proceedings
Publisher	Institute of Electrical and Electronics Engineers Inc.
ISBN (Electronic)	9781943580767
Publication status	Published - 2020 May
Event	2020 Conference on Lasers and Electro-Optics, CLEO 2020 - San Jose, United States Duration: 2020 May 10 → 2020 May 15

Publication series

Name	Conference Proceedings - Lasers and Electro-Optics Society Annual Meeting-LEOS
Volume	2020-May
ISSN (Print)	1092-8081

Conference

Conference	2020 Conference on Lasers and Electro-Optics, CLEO 2020
Country/Territory	United States
City	San Jose
Period	20/5/10 → 20/5/15

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Electrical and Electronic Engineering

Cite this

Laser Microfabrication of Metal Surfaces by Tightly Focused Higher-Order Vector Beams. / Sato, Masaki; Kozawa, Yuichi; Sato, Shunichi.

2020 Conference on Lasers and Electro-Optics, CLEO 2020 - Proceedings. Institute of Electrical and Electronics Engineers Inc., 2020. 9192116 (Conference Proceedings - Lasers and Electro-Optics Society Annual Meeting-LEOS; Vol. 2020-May).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Sato, M, Kozawa, Y & Sato, S 2020, Laser Microfabrication of Metal Surfaces by Tightly Focused Higher-Order Vector Beams. in 2020 Conference on Lasers and Electro-Optics, CLEO 2020 - Proceedings., 9192116, Conference Proceedings - Lasers and Electro-Optics Society Annual Meeting-LEOS, vol. 2020-May, Institute of Electrical and Electronics Engineers Inc., 2020 Conference on Lasers and Electro-Optics, CLEO 2020, San Jose, United States, 20/5/10.

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abstract = "We present an experimental study on laser microfabrication of metal surfaces by using femtosecond, higher-order vector beams. The contribution of the longitudinal electric field in laser ablation depends on target material.",

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AU - Sato, Shunichi

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N2 - We present an experimental study on laser microfabrication of metal surfaces by using femtosecond, higher-order vector beams. The contribution of the longitudinal electric field in laser ablation depends on target material.

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M3 - Conference contribution

AN - SCOPUS:85091653007

T3 - Conference Proceedings - Lasers and Electro-Optics Society Annual Meeting-LEOS

BT - 2020 Conference on Lasers and Electro-Optics, CLEO 2020 - Proceedings

PB - Institute of Electrical and Electronics Engineers Inc.

T2 - 2020 Conference on Lasers and Electro-Optics, CLEO 2020

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ER -

Laser Microfabrication of Metal Surfaces by Tightly Focused Higher-Order Vector Beams

Abstract

Publication series

Conference

ASJC Scopus subject areas

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