Laser-induced fluorescence measurement of metastable chlorine ion temperature in time-modulated inductively coupled plasma

S. Kumagai, M. Sasaki, M. Koyanagi, K. Hane

Research output: Contribution to journalArticlepeer-review

4 Citations (Scopus)

Abstract

The temperature of metastable chlorine ions Cl+* in a time-modulated inductively coupled plasma was measured with the time-resolved laser-induced fluorescence technique. The Cl+* temperature changed periodically according to the modulation of the plasma and decreased slightly in the afterglow region. The Cl+* temperature was measured as a function of rf power and gas pressure, while the relative Cl+* density was also measured simultaneously as a function of time. The Cl+* density decreased to be 30% of the maximum density within 10 μs in discharge-off periods.

Original languageEnglish
Pages (from-to)3070-3073
Number of pages4
JournalJournal of the Electrochemical Society
Volume147
Issue number8
DOIs
Publication statusPublished - 2000 Aug 1

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Renewable Energy, Sustainability and the Environment
  • Surfaces, Coatings and Films
  • Electrochemistry
  • Materials Chemistry

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