TY - GEN
T1 - Laser direct writing of reduced graphene oxide micropatterns and sensor applications
AU - Watanabe, Akira
AU - Cai, Jinguang
N1 - Funding Information:
This work was supported by MEXT KAKENHI Grant Number 24102004, JSPS KAKENHI Grant Number 15H04132, National Natural Science Foundation of China (No. 21603201), and China Academy of Engineering Physics (item no. TP201302-3). The authors thank Mr. Eiji Aoyagi of Institute for Material Research, Tohoku University for help with SEM measurements.
Publisher Copyright:
© Copyright SPIE.
PY - 2018
Y1 - 2018
N2 - Micropatterns consisting of reduced graphene oxide (rGO) and graphene oxide (GO) were fabricated via laser direct writing where an insulating GO was converted to a conductive rGO by laser-induced reduction. The rGO/GO microinterdigitated electrode showed humidity sensing behaviors. The influence of the shape and size of the rGO/GO microinterdigitated electrode was studied to discuss the sensing mechanism and to improve the sensitivity. Three kinds of rGO(w)/GO(g) micropatterns were prepared by laser direct writing on a GO-coated PET (polyethylene terephthalate) substrate using a CW 405 nm semiconductor laser, where w and g are the rGO electrode width and the GO gap width between rGO electrodes in micrometer unit, respectively. The humidity sensing properties of rGO(400)/GO(100), rGO(160)/GO(40), and rGO(80)/GO(20) were studied by monitoring the output voltage waveform from an electronic circuit consisting an rGO/GO interdigitated electrode and resistors in AC mode operation. The sensitivity enhancement induced by charging property of an rGO/GO interdigitated electrodes was observed accompanying transient decay of the output voltage. The shape and size of an rGO/GO interdigitated electrode remarkably influenced the humidity sensing behaviors depending on the contribution ratio of C and R parameters.
AB - Micropatterns consisting of reduced graphene oxide (rGO) and graphene oxide (GO) were fabricated via laser direct writing where an insulating GO was converted to a conductive rGO by laser-induced reduction. The rGO/GO microinterdigitated electrode showed humidity sensing behaviors. The influence of the shape and size of the rGO/GO microinterdigitated electrode was studied to discuss the sensing mechanism and to improve the sensitivity. Three kinds of rGO(w)/GO(g) micropatterns were prepared by laser direct writing on a GO-coated PET (polyethylene terephthalate) substrate using a CW 405 nm semiconductor laser, where w and g are the rGO electrode width and the GO gap width between rGO electrodes in micrometer unit, respectively. The humidity sensing properties of rGO(400)/GO(100), rGO(160)/GO(40), and rGO(80)/GO(20) were studied by monitoring the output voltage waveform from an electronic circuit consisting an rGO/GO interdigitated electrode and resistors in AC mode operation. The sensitivity enhancement induced by charging property of an rGO/GO interdigitated electrodes was observed accompanying transient decay of the output voltage. The shape and size of an rGO/GO interdigitated electrode remarkably influenced the humidity sensing behaviors depending on the contribution ratio of C and R parameters.
KW - graphene oxide
KW - humidity sensor flexible electronics
KW - in-plane micro-supercapacitor
KW - laser direct writing
KW - micro-interdigitated electrode
KW - reduced graphene oxide
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U2 - 10.1117/12.2288355
DO - 10.1117/12.2288355
M3 - Conference contribution
AN - SCOPUS:85048570632
T3 - Proceedings of SPIE - The International Society for Optical Engineering
BT - Laser-Based Micro- and Nanoprocessing XII
A2 - Washio, Kunihiko
A2 - Kling, Rainer
A2 - Klotzbach, Udo
PB - SPIE
T2 - Laser-Based Micro- and Nanoprocessing XII 2018
Y2 - 30 January 2018 through 1 February 2018
ER -