Laser direct writing of reduced graphene oxide micropatterns and sensor applications

Akira Watanabe, Jinguang Cai

    Research output: Chapter in Book/Report/Conference proceedingConference contribution

    1 Citation (Scopus)


    Micropatterns consisting of reduced graphene oxide (rGO) and graphene oxide (GO) were fabricated via laser direct writing where an insulating GO was converted to a conductive rGO by laser-induced reduction. The rGO/GO microinterdigitated electrode showed humidity sensing behaviors. The influence of the shape and size of the rGO/GO microinterdigitated electrode was studied to discuss the sensing mechanism and to improve the sensitivity. Three kinds of rGO(w)/GO(g) micropatterns were prepared by laser direct writing on a GO-coated PET (polyethylene terephthalate) substrate using a CW 405 nm semiconductor laser, where w and g are the rGO electrode width and the GO gap width between rGO electrodes in micrometer unit, respectively. The humidity sensing properties of rGO(400)/GO(100), rGO(160)/GO(40), and rGO(80)/GO(20) were studied by monitoring the output voltage waveform from an electronic circuit consisting an rGO/GO interdigitated electrode and resistors in AC mode operation. The sensitivity enhancement induced by charging property of an rGO/GO interdigitated electrodes was observed accompanying transient decay of the output voltage. The shape and size of an rGO/GO interdigitated electrode remarkably influenced the humidity sensing behaviors depending on the contribution ratio of C and R parameters.

    Original languageEnglish
    Title of host publicationLaser-Based Micro- and Nanoprocessing XII
    EditorsKunihiko Washio, Rainer Kling, Udo Klotzbach
    ISBN (Electronic)9781510615250
    Publication statusPublished - 2018
    EventLaser-Based Micro- and Nanoprocessing XII 2018 - San Francisco, United States
    Duration: 2018 Jan 302018 Feb 1

    Publication series

    NameProceedings of SPIE - The International Society for Optical Engineering
    ISSN (Print)0277-786X
    ISSN (Electronic)1996-756X


    OtherLaser-Based Micro- and Nanoprocessing XII 2018
    Country/TerritoryUnited States
    CitySan Francisco


    • graphene oxide
    • humidity sensor flexible electronics
    • in-plane micro-supercapacitor
    • laser direct writing
    • micro-interdigitated electrode
    • reduced graphene oxide

    ASJC Scopus subject areas

    • Electronic, Optical and Magnetic Materials
    • Condensed Matter Physics
    • Computer Science Applications
    • Applied Mathematics
    • Electrical and Electronic Engineering


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