Laser CVD process for high speed deposition of YSZ films

Takashi Goto

Research output: Contribution to journalConference articlepeer-review

1 Citation (Scopus)


Thick oxide coatings have wide ranged applications such as oxidation protection, abrasives and thermal barrier coating (TBC). Yttria stabilized zirconia (YSZ) has been used for TBC in gas turbines. Generally, atmospheric plasma spray (APS) and electron-beam physical vapor deposition (EB-PVD) have been utilized in practical applications. Although chemical vapor deposition (CVD) provides high quality coatings, the deposition rate of CVD could have been too small for TBCs. We have recently developed a new laser CVD process achieving an extremely high deposition rate up to 660 μm/h for YSZ coatings on Al2O3 substrates and Ni-based super alloy substrates using Zr(dpm)4 and Y(dpm)3 precursors. An Nd:YAG laser with a high power of 250 W was introduced in a CVD chamber as a defocused beam in a diameter of 20mm covering a whole substrate surface. The YSZ coatings had a well-grown columnar structure with significant (200) orientation. Other oxides such as Y2O3, Al2O3 and TiO 2 films were also prepared by laser CVD at high deposition rates around 1 mm/h.

Original languageEnglish
Pages (from-to)1213-1218
Number of pages6
JournalMaterials Science Forum
Issue numberII
Publication statusPublished - 2005 Jan 1
EventPRICM 5: The Fifth Pacific Rim International Conference on Advanced Materials and Processing - Beijing, China
Duration: 2004 Nov 22004 Nov 5


  • CVD
  • Chemical vapor deposition
  • High seed deposition
  • Laser CVD
  • TBC
  • Thermal barrier coating
  • YSZ
  • Yttria stabilized zirconia

ASJC Scopus subject areas

  • Materials Science(all)
  • Condensed Matter Physics
  • Mechanics of Materials
  • Mechanical Engineering


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