Laser chemical vapor deposition of TiN film on Ti(C,N)-based cermet substrate using Ti(OiPr)2(dpm)2-NH3 system

Yu You, Akihiko Ito, Rong Tu, Takashi Goto

Research output: Contribution to journalArticlepeer-review

5 Citations (Scopus)

Fingerprint

Dive into the research topics of 'Laser chemical vapor deposition of TiN film on Ti(C,N)-based cermet substrate using Ti(OiPr)<sub>2</sub>(dpm)<sub>2</sub>-NH<sub>3</sub> system'. Together they form a unique fingerprint.

Engineering & Materials Science

Physics & Astronomy

Chemical Compounds