Laser chemical vapor deposition of single-crystalline transparent CeO2 films

Pei Zhao, Akihiko Ito, Takashi Goto

Research output: Contribution to journalArticle

11 Citations (Scopus)

Abstract

Single-crystalline transparent CeO2 films were prepared on (100) SrTiO3 single-crystal substrates by laser chemical vapor deposition. At deposition temperatures ranging from 952 to 1080K, epitaxial (100) CeO2 films grew as columnar grains, which resulted in opaque films. The epitaxial CeO2 film prepared at 1120K exhibited a flat surface and dense cross section. The epitaxial CeO2 films grown on SrTiO3 substrates showed coherent lattice matching at the interface, even at high deposition rates of 15-25μmh-1. The epitaxial relationship was CeO2 [100]//SrTiO3 [100] and CeO2 [011]//SrTiO3 [001]. The epitaxial CeO2 film prepared at 1120K was a highly transparent single-crystalline film, and the transmittance at a wavelength of 600nm reached 97% of the SrTiO3 substrate.

Original languageEnglish
Pages (from-to)273-276
Number of pages4
JournalSurface and Coatings Technology
Volume235
DOIs
Publication statusPublished - 2013 Nov 25

Keywords

  • CeO
  • Laser chemical vapor deposition
  • Single-crystalline film
  • Transparent film

ASJC Scopus subject areas

  • Chemistry(all)
  • Condensed Matter Physics
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films
  • Materials Chemistry

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