Laser absorption spectroscopy diagnostics of helium metastable atoms generated in dielectric barrier discharge cryoplasmas

Keiichiro Urabe, Hitoshi Muneoka, Sven Stauss, Osamu Sakai, Kazuo Terashima

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8 Citations (Scopus)

Abstract

Cryoplasmas, which are plasmas whose gas temperatures are below room temperature (RT), have shown dynamic changes in their physical and chemical characteristics when the gas temperature in the plasmas (Tgp) was decreased from RT. In this study, we measured the temporal behavior of helium metastable (Hem) atoms generated in a parallel-plate dielectric barrier discharge at ambient gas temperatures (Tga) of 300, 100, and 14K and with a gas density similar to atmospheric conditions by laser absorption spectroscopy. The increments of Tgp to Tga were less than 20 K. We found from the results that the Hem lifetime and maximum density become longer and larger over one order of magnitude for lower Tga. The reasons for the long Hem lifetime at low Tga are decreases in the rate coefficients of three-body Hem quenching reactions and in the amounts of molecular impurities with boiling points higher than that of He.

Original languageEnglish
Article number106101
JournalJapanese journal of applied physics
Volume54
Issue number10
DOIs
Publication statusPublished - 2015 Oct 1
Externally publishedYes

ASJC Scopus subject areas

  • Engineering(all)
  • Physics and Astronomy(all)

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