Large-scale membrane transfer process: Its application to single-crystal-silicon continuous membrane deformable mirror

Research output: Contribution to journalArticlepeer-review

3 Citations (Scopus)

Abstract

This paper describes a large-scale membrane transfer process developed for the construction of large-scale membrane devices via the transfer of continuous single-crystal-silicon membranes from one substrate to another. This technique is applied for fabricating a large stroke deformable mirror. A bimorph spring array is used to generate a large air gap between the mirror membrane and the electrode. A 1.9 mm × 1.9 mm × 2 m single-crystal-silicon membrane is successfully transferred to the electrode substrate by Au-Si eutectic bonding and the subsequent all-dry release process. This process provides an effective approach for transferring a free-standing large continuous single-crystal- silicon to a flexible suspension spring array with a large air gap.

Original languageEnglish
Article number125003
JournalJournal of Micromechanics and Microengineering
Volume23
Issue number12
DOIs
Publication statusPublished - 2013 Dec

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Mechanics of Materials
  • Mechanical Engineering
  • Electrical and Electronic Engineering

Fingerprint Dive into the research topics of 'Large-scale membrane transfer process: Its application to single-crystal-silicon continuous membrane deformable mirror'. Together they form a unique fingerprint.

Cite this