Large-rotation and low-voltage driving realized by micromirror with vertical comb and tense thin film torsion bar

Shinya Yuuki; Minoru Sasaki; Kazuhiro Hane

doi:10.1109/SENSOR.2005.1497284

Large-rotation and low-voltage driving realized by micromirror with vertical comb and tense thin film torsion bar

Shinya Yuuki, Minoru Sasaki, Kazuhiro Hane

ENG - Finemechanics

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

1 Citation (Scopus)

Abstract

A micromirror device is developed realizing the large-rotation and the low-voltage driving. The bulk Si micromirror is suspended with the thin film torsion bars. Inside the torsion bar, the tension is included for suppressing the additional movement (e.g., vertical movement or in-plane rotation). The torsion bar can be compliant in the mirror rotation and stiff in other movement. The rotation of 7.3 degrees is obtained at 5 V.

Original language	English
Title of host publication	TRANSDUCERS '05 - 13th International Conference on Solid-State Sensors and Actuators and Microsystems - Digest of Technical Papers
Pages	1163-1166
Number of pages	4
DOIs	https://doi.org/10.1109/SENSOR.2005.1497284
Publication status	Published - 2005 Nov 9
Event	13th International Conference on Solid-State Sensors and Actuators and Microsystems, TRANSDUCERS '05 - Seoul, Korea, Republic of Duration: 2005 Jun 5 → 2005 Jun 9

Publication series

Name	Digest of Technical Papers - International Conference on Solid State Sensors and Actuators and Microsystems, TRANSDUCERS '05
Volume	2

Other

Other	13th International Conference on Solid-State Sensors and Actuators and Microsystems, TRANSDUCERS '05
Country/Territory	Korea, Republic of
City	Seoul
Period	05/6/5 → 05/6/9

Keywords

Low-voltage driving
Tensile stress
Tension
Thin film torsion bar

ASJC Scopus subject areas

Engineering(all)

Access to Document

10.1109/SENSOR.2005.1497284

Cite this

Yuuki, S., Sasaki, M., & Hane, K. (2005). Large-rotation and low-voltage driving realized by micromirror with vertical comb and tense thin film torsion bar. In TRANSDUCERS '05 - 13th International Conference on Solid-State Sensors and Actuators and Microsystems - Digest of Technical Papers (pp. 1163-1166). [3A2.1] (Digest of Technical Papers - International Conference on Solid State Sensors and Actuators and Microsystems, TRANSDUCERS '05; Vol. 2). https://doi.org/10.1109/SENSOR.2005.1497284

Large-rotation and low-voltage driving realized by micromirror with vertical comb and tense thin film torsion bar. / Yuuki, Shinya; Sasaki, Minoru; Hane, Kazuhiro.

TRANSDUCERS '05 - 13th International Conference on Solid-State Sensors and Actuators and Microsystems - Digest of Technical Papers. 2005. p. 1163-1166 3A2.1 (Digest of Technical Papers - International Conference on Solid State Sensors and Actuators and Microsystems, TRANSDUCERS '05; Vol. 2).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Yuuki, S, Sasaki, M & Hane, K 2005, Large-rotation and low-voltage driving realized by micromirror with vertical comb and tense thin film torsion bar. in TRANSDUCERS '05 - 13th International Conference on Solid-State Sensors and Actuators and Microsystems - Digest of Technical Papers., 3A2.1, Digest of Technical Papers - International Conference on Solid State Sensors and Actuators and Microsystems, TRANSDUCERS '05, vol. 2, pp. 1163-1166, 13th International Conference on Solid-State Sensors and Actuators and Microsystems, TRANSDUCERS '05, Seoul, Korea, Republic of, 05/6/5. https://doi.org/10.1109/SENSOR.2005.1497284

Yuuki S, Sasaki M, Hane K. Large-rotation and low-voltage driving realized by micromirror with vertical comb and tense thin film torsion bar. In TRANSDUCERS '05 - 13th International Conference on Solid-State Sensors and Actuators and Microsystems - Digest of Technical Papers. 2005. p. 1163-1166. 3A2.1. (Digest of Technical Papers - International Conference on Solid State Sensors and Actuators and Microsystems, TRANSDUCERS '05). https://doi.org/10.1109/SENSOR.2005.1497284

Yuuki, Shinya ; Sasaki, Minoru ; Hane, Kazuhiro. / Large-rotation and low-voltage driving realized by micromirror with vertical comb and tense thin film torsion bar. TRANSDUCERS '05 - 13th International Conference on Solid-State Sensors and Actuators and Microsystems - Digest of Technical Papers. 2005. pp. 1163-1166 (Digest of Technical Papers - International Conference on Solid State Sensors and Actuators and Microsystems, TRANSDUCERS '05).

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abstract = "A micromirror device is developed realizing the large-rotation and the low-voltage driving. The bulk Si micromirror is suspended with the thin film torsion bars. Inside the torsion bar, the tension is included for suppressing the additional movement (e.g., vertical movement or in-plane rotation). The torsion bar can be compliant in the mirror rotation and stiff in other movement. The rotation of 7.3 degrees is obtained at 5 V.",

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N2 - A micromirror device is developed realizing the large-rotation and the low-voltage driving. The bulk Si micromirror is suspended with the thin film torsion bars. Inside the torsion bar, the tension is included for suppressing the additional movement (e.g., vertical movement or in-plane rotation). The torsion bar can be compliant in the mirror rotation and stiff in other movement. The rotation of 7.3 degrees is obtained at 5 V.

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Large-rotation and low-voltage driving realized by micromirror with vertical comb and tense thin film torsion bar

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Keywords

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