TY - GEN
T1 - Large-rotation and low-voltage driving realized by micromirror with vertical comb and tense thin film torsion bar
AU - Yuuki, Shinya
AU - Sasaki, Minoru
AU - Hane, Kazuhiro
PY - 2005/11/9
Y1 - 2005/11/9
N2 - A micromirror device is developed realizing the large-rotation and the low-voltage driving. The bulk Si micromirror is suspended with the thin film torsion bars. Inside the torsion bar, the tension is included for suppressing the additional movement (e.g., vertical movement or in-plane rotation). The torsion bar can be compliant in the mirror rotation and stiff in other movement. The rotation of 7.3 degrees is obtained at 5 V.
AB - A micromirror device is developed realizing the large-rotation and the low-voltage driving. The bulk Si micromirror is suspended with the thin film torsion bars. Inside the torsion bar, the tension is included for suppressing the additional movement (e.g., vertical movement or in-plane rotation). The torsion bar can be compliant in the mirror rotation and stiff in other movement. The rotation of 7.3 degrees is obtained at 5 V.
KW - Low-voltage driving
KW - Tensile stress
KW - Tension
KW - Thin film torsion bar
UR - http://www.scopus.com/inward/record.url?scp=27544452654&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=27544452654&partnerID=8YFLogxK
U2 - 10.1109/SENSOR.2005.1497284
DO - 10.1109/SENSOR.2005.1497284
M3 - Conference contribution
AN - SCOPUS:27544452654
SN - 0780389948
SN - 9780780389946
T3 - Digest of Technical Papers - International Conference on Solid State Sensors and Actuators and Microsystems, TRANSDUCERS '05
SP - 1163
EP - 1166
BT - TRANSDUCERS '05 - 13th International Conference on Solid-State Sensors and Actuators and Microsystems - Digest of Technical Papers
T2 - 13th International Conference on Solid-State Sensors and Actuators and Microsystems, TRANSDUCERS '05
Y2 - 5 June 2005 through 9 June 2005
ER -