Large-rotation and low-voltage driving realized by micromirror with vertical comb and tense thin film torsion bar

Shinya Yuuki, Minoru Sasaki, Kazuhiro Hane

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Abstract

A micromirror device is developed realizing the large-rotation and the low-voltage driving. The bulk Si micromirror is suspended with the thin film torsion bars. Inside the torsion bar, the tension is included for suppressing the additional movement (e.g., vertical movement or in-plane rotation). The torsion bar can be compliant in the mirror rotation and stiff in other movement. The rotation of 7.3 degrees is obtained at 5 V.

Original languageEnglish
Title of host publicationTRANSDUCERS '05 - 13th International Conference on Solid-State Sensors and Actuators and Microsystems - Digest of Technical Papers
Pages1163-1166
Number of pages4
DOIs
Publication statusPublished - 2005 Nov 9
Event13th International Conference on Solid-State Sensors and Actuators and Microsystems, TRANSDUCERS '05 - Seoul, Korea, Republic of
Duration: 2005 Jun 52005 Jun 9

Publication series

NameDigest of Technical Papers - International Conference on Solid State Sensors and Actuators and Microsystems, TRANSDUCERS '05
Volume2

Other

Other13th International Conference on Solid-State Sensors and Actuators and Microsystems, TRANSDUCERS '05
CountryKorea, Republic of
CitySeoul
Period05/6/505/6/9

Keywords

  • Low-voltage driving
  • Tensile stress
  • Tension
  • Thin film torsion bar

ASJC Scopus subject areas

  • Engineering(all)

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