Large-rotation and low-voltage driving of micromirror realized by tense thin-film torsion bar

Minoru Sasaki; Shinya Yuki; Kazuhiro Hane

doi:10.1109/LPT.2006.879587

Large-rotation and low-voltage driving of micromirror realized by tense thin-film torsion bar

Minoru Sasaki, Shinya Yuki, Kazuhiro Hane

New Industry Creation Hatchery Center (NICHe)

Research output: Contribution to journal › Article › peer-review

17 Citations (Scopus)

Abstract

An electrostatically driven micromirror device using a thin-film torsion bar is proposed. The mirror rotation angle of 7.3° at 5 V is demonstrated at the nonresonant condition. A bulk Si micromirror is suspended by SiN thin-film torsion bars. Inside the torsion bar, the tension having the magnitude larger than that of the driving force is included. The torsion bar can have a compliance with the mirror rotation and the rigidity against the unwanted motions (e.g., vertical displacement or in-plane rotation).

Original language	English
Pages (from-to)	1573-1575
Number of pages	3
Journal	IEEE Photonics Technology Letters
Volume	18
Issue number	15
DOIs	https://doi.org/10.1109/LPT.2006.879587
Publication status	Published - 2006 Aug 1

Keywords

Electrostatic driving
Low-voltage driving
Micromirror
Tension
Thin-film torsion bar

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Atomic and Molecular Physics, and Optics
Electrical and Electronic Engineering

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10.1109/LPT.2006.879587

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title = "Large-rotation and low-voltage driving of micromirror realized by tense thin-film torsion bar",

abstract = "An electrostatically driven micromirror device using a thin-film torsion bar is proposed. The mirror rotation angle of 7.3° at 5 V is demonstrated at the nonresonant condition. A bulk Si micromirror is suspended by SiN thin-film torsion bars. Inside the torsion bar, the tension having the magnitude larger than that of the driving force is included. The torsion bar can have a compliance with the mirror rotation and the rigidity against the unwanted motions (e.g., vertical displacement or in-plane rotation).",

keywords = "Electrostatic driving, Low-voltage driving, Micromirror, Tension, Thin-film torsion bar",

author = "Minoru Sasaki and Shinya Yuki and Kazuhiro Hane",

year = "2006",

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doi = "10.1109/LPT.2006.879587",

language = "English",

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journal = "IEEE Photonics Technology Letters",

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TY - JOUR

T1 - Large-rotation and low-voltage driving of micromirror realized by tense thin-film torsion bar

AU - Sasaki, Minoru

AU - Yuki, Shinya

AU - Hane, Kazuhiro

PY - 2006/8/1

Y1 - 2006/8/1

N2 - An electrostatically driven micromirror device using a thin-film torsion bar is proposed. The mirror rotation angle of 7.3° at 5 V is demonstrated at the nonresonant condition. A bulk Si micromirror is suspended by SiN thin-film torsion bars. Inside the torsion bar, the tension having the magnitude larger than that of the driving force is included. The torsion bar can have a compliance with the mirror rotation and the rigidity against the unwanted motions (e.g., vertical displacement or in-plane rotation).

AB - An electrostatically driven micromirror device using a thin-film torsion bar is proposed. The mirror rotation angle of 7.3° at 5 V is demonstrated at the nonresonant condition. A bulk Si micromirror is suspended by SiN thin-film torsion bars. Inside the torsion bar, the tension having the magnitude larger than that of the driving force is included. The torsion bar can have a compliance with the mirror rotation and the rigidity against the unwanted motions (e.g., vertical displacement or in-plane rotation).

KW - Electrostatic driving

KW - Low-voltage driving

KW - Micromirror

KW - Tension

KW - Thin-film torsion bar

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SN - 1041-1135

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SP - 1573

EP - 1575

JO - IEEE Photonics Technology Letters

JF - IEEE Photonics Technology Letters

IS - 15

ER -

Large-rotation and low-voltage driving of micromirror realized by tense thin-film torsion bar

Abstract

Keywords

ASJC Scopus subject areas

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