Large figure-of-merit epitaxial Pb(Mn,Nb)O3-Pb(Zr,Ti)O3/Si transducer for piezoelectric MEMS sensors

Hiroaki Hanzawa, Shinya Yoshida, Kiyotaka Wasa, Shuji Tanaka

    Research output: Chapter in Book/Report/Conference proceedingConference contribution

    Abstract

    A large figure-of-merit (FOM) piezoelectric transducer has been developed based on a Pb(Mn,Nb)O3-Pb(Zr,Ti)O3 (PMnN-PZT) epitaxial thin film on a Si substrate for MEMS (Micro Electro Mechanical Systems) sensors such as vibratory gyroscopes. A c-axis oriented PMnN-PZT thin film was epitaxially grown on a Si substrate covered with buffer layers by sputter deposition with fast cooling. This film has excellent properties of a large piezoelectric coefficient (e31,f, ∼-14 C/m2), a small dielectric constant (εr33, ∼200), and high Curie temperature (Tc, >500 °C) compared to PZT-based bulk ceramics. The calculated FOM for piezoelectric MEMS gyroscopes reached 110 GPa, which is 5 times larger than those of conventional PZT polycrystalline thin films. We believe that the epitaxial PMnN-PZT/Si transducer has a great potential for high performance piezoelectric gyroscopes.

    Original languageEnglish
    Title of host publication2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015
    PublisherInstitute of Electrical and Electronics Engineers Inc.
    Pages1338-1341
    Number of pages4
    ISBN (Electronic)9781479989553
    DOIs
    Publication statusPublished - 2015 Aug 5
    Event18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015 - Anchorage, United States
    Duration: 2015 Jun 212015 Jun 25

    Publication series

    Name2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015

    Other

    Other18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015
    CountryUnited States
    CityAnchorage
    Period15/6/2115/6/25

    Keywords

    • Pb(Mn,Nb)O-Pb(Zr,Ti)O epitaxial thin film
    • piezoelectric MEMS gyroscope

    ASJC Scopus subject areas

    • Instrumentation
    • Electrical and Electronic Engineering

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  • Cite this

    Hanzawa, H., Yoshida, S., Wasa, K., & Tanaka, S. (2015). Large figure-of-merit epitaxial Pb(Mn,Nb)O3-Pb(Zr,Ti)O3/Si transducer for piezoelectric MEMS sensors. In 2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015 (pp. 1338-1341). [7181179] (2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/TRANSDUCERS.2015.7181179