Large-displacement micro-XY-stage with paired moving plates

Minoru Sasaki, Fuminori Bono, Kazuhiro Hane

Research output: Contribution to journalArticlepeer-review

22 Citations (Scopus)

Abstract

An XY-stage driven by electrostatic comb drive actuators is fabricated realizing displacements of over 100 μm for both axes. The plates are prepared in one layer of the silicon-on-insulator (SOI) wafer and the actuators are prepared in another layer. The raster scanning of the plate is realized by maintaining orthogonal x- and y-movements. The fast scanning is along the y-axis. Paired 820 × 950-μm2-size media plates are driven at the mutually opposite y-directions canceling the inertial force. The static maximum displacements are 110 μm (geometrical limit) for the x-axis and 90 μm for the y-axis. At the resonance state, 115 μm (geometrical limit) is obtained for the y-axis.

Original languageEnglish
Pages (from-to)3226-3231
Number of pages6
JournalJapanese journal of applied physics
Volume47
Issue number4 PART 2
DOIs
Publication statusPublished - 2008 Apr 25

Keywords

  • Counter mass
  • Electrostatic actuator
  • Large displacement
  • XY-stage

ASJC Scopus subject areas

  • Engineering(all)
  • Physics and Astronomy(all)

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