Large area imaging by Fourier transform holography using soft and hard X-rays

Naoki Awaji, Kenji Nomura, Shuuichi Doi, Shinji Isogami, Masakiyo Tsunoda, Kenji Kodama, Motohiro Suzuki, Tetsuya Nakamura

Research output: Contribution to journalArticlepeer-review

3 Citations (Scopus)

Abstract

We studied a new method for large area imaging by Fourier transform holography in both soft and hard X-ray regions. In soft X-ray region, magnetic domain image of the perpendicular magnetized film was observed in the 8 μm area at an X-ray energy of 778eV. In hard X-ray region, the method was applied to observe both the artificially patterned sample in 7μm area and the cross-section of Cu-interconnect-line, at an X-ray energy of 5500 eV. The spatial resolution, estimated from the 10 to 90% intensity change, was 42 and 75 nm at 778 and 5500 eV, respectively.

Original languageEnglish
Article number085201
JournalApplied Physics Express
Volume3
Issue number8
DOIs
Publication statusPublished - 2010 Aug

ASJC Scopus subject areas

  • Engineering(all)
  • Physics and Astronomy(all)

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