Large area, freestanding GaN nanocolumn membrane with bottom subwavelength nanostructure

Yongjin Wang, Fangren Hu, Yoshiaki Kanamori, Tong Wu, Kazuhiro Hane

Research output: Contribution to journalArticlepeer-review

16 Citations (Scopus)

Abstract

We propose, fabricate and characterize the freestanding GaN nanocolumn membrane with bottom subwavelength nanostructures. The GaN nanocolumns are epitaxially grown on freestanding nanostructured silicon substrate that is achieved by a combination of self-assemble technique and silicon-on-insulator (SOI) technology. Optical reflection is greatly suppressed in the visible range due to the graded refractive index effect of subwavelength nanostructures. The freestanding GaN nanocolumn membrane is realized by removing silicon substrate from the backside, eliminating the silicon absorption of the emitted light and leading to a strong blue emission from the bottom side. The obtained structures also demonstrate the potential application for anti-reflective (AR) coating and GaN-Si hybrid microelectromechanical system (MEMS).

Original languageEnglish
Pages (from-to)5504-5511
Number of pages8
JournalOptics Express
Volume18
Issue number6
DOIs
Publication statusPublished - 2010 Mar 15

ASJC Scopus subject areas

  • Atomic and Molecular Physics, and Optics

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