Lamp-heated rapid vapor-phase doping technology for 100-GHz Si bipolar transistors

Yukihiro Kiyota, Eiji Ohue, Takahiro Onai, Katsuyoshi Washio, Masamichi Tanabe, Taroh Inada

Research output: Contribution to conferencePaperpeer-review

6 Citations (Scopus)

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Engineering & Materials Science