Laminated capacitor formed in thermoplastic resin substrate by laser-assisted micropowder jet implantation

Katsuhiko Suzuki, Shotaroh Kameya, Tohru Sugai, Takumi Ohuchi, Kaichi Miura, Tsunemoto Kuriyagawa

Research output: Contribution to journalArticlepeer-review

Abstract

A laminated capacitor has been formed in a poly(oxymethylene) substrate of the thermoplastic resin by a laser-assisted micro powder jet implantation method. A carbon powder and a BaTiO3 powder were jetted for an electrode and a dielectric in turn with Ar gas while irradiating a Nd:YAG laser on the substrate, respectively. It was confirmed that the capacitance formed by this method was proportional to size of electrode areas and number of laminations. The dielectric constant estimated experimentally showed a large value of 5:2 × 103, which was probably enhanced by BaTiO3 particles crushed to a particle size of approximately 150nm through the jetting process. It was found that the capacitance showed an exponential dependence against the coming and going repetition number of times of powder jetting at formation of the dielectric layer, which is probably affected by both the increase in the thickness and the decrease in the dielectric constant according to the number of dielectric laminations.

Original languageEnglish
Article number06GL02
JournalJapanese journal of applied physics
Volume52
Issue number6 PART 2
DOIs
Publication statusPublished - 2013 Jun

ASJC Scopus subject areas

  • Engineering(all)
  • Physics and Astronomy(all)

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